Micromachined high reflectance deformable mirror

摘要

A high reflectance deformable mirror includes first and second substrates. The first substrate has formed therein a membrane having a bottom surface and a polished top surface. The top surface of the membrane forms the mirror surface and is preferably covered with a high reflectance coating. The first substrate also has formed therein at least one pillar for deforming the membrane. The pillar is integrally formed with the membrane and extends from the bottom surface of the membrane. The second substrate has at least one actuating member positioned thereon for actuating the pillar. Further, the first substrate is mounted to the second substrate such that the bottom surface of the membrane faces the second substrate. In a preferred embodiment, the actuating member comprises an electrode for applying an electrostatic force to the pillar. Also disclosed are single substrate embodiments of the mirror and preferred methods for producing the mirror.