Low temperature high humidity detection device and low temperature high humidity control unit

摘要

PURPOSE: To obtain a low-temperature humidity detector with a high humidity stability which can detect the high humidity at a low temperature with improved response and a low-temperature high-humidity controller which can control the lowtemperature high-humidity atmosphere with improved response and linearity. ;CONSTITUTION: The air which is sucked by a ventilation mechanism 11e of an enclosure 11a by a sensor part 11 of a device 1 is heated to a temperature which is higher by a specific temperature by a heating means 11c and the humidity is detected by a humidity-sensing element 11f. A detection means 13 detects the humidity of air which is higher by a specific temperature according to the signal from the sensor part. A compensation means 14 performs compensation by the amount which is reduced by heating based on the detection humidity, thus obtaining the humidity before heating. The compensation means 14 is provided with a means 14a for storing compensation value for a detection humidity. A control means 21 compares the detection humidity with a set one and stops a humidifier 24 and then controls the humidity to a set one.;COPYRIGHT: (C)1994,JPO&Japio