SURFACE CLEANING METHOD, SURFACE CLEANING DEVICE, STEAM GENERATOR, PHOTOCATALYST CONTAINER, PHOTOCLEANING SURFACE OF OBJECT FOR CLEANING, PHOTOCATALYST SURFACE FORMING METHOD, PHOTOCATALYST SURFACE FORMING DEVICE AND PHOTOCATALYST SURFACE DEVICE

摘要

PROBLEM TO BE SOLVED: To 'highly clean' surfaces to molecular and atomic levels and to maintain the cleanliness of the surfaces at 1012 molecule/cm2. ;SOLUTION: The surface cleaning method having a first step of injecting photocatalyst steam to the surface of an object for cleaning and a second step of irradiating the surface of this object for cleaning with light including UV rays is provided. The steam generated from a pure water dispersion of titanium oxide is adopted for the photocatalyst steam of the first step and the surface of the object for cleaning is irradiated with the light including the UV rays for the second step, by which the surface of the object for cleaning may be 'highly cleaned' to the molecular and atomic levels.;COPYRIGHT: (C)2001,JPO