ILLUMINATION DEVICE AND ILLUMINATION METHOD, AND ALIGNER WITH THE ILLUMINATION DEVICE AND MANUFACTURING METHOD OF DEVICE BY MEANS OF THEM

摘要

PROBLEM TO BE SOLVED: To provide an illumination device and an illumination method which can keep illuminance constant stably even if a plurality of illumination light sources are used and reduce frequency of exchange of an illumination light source and improve the operation yield by holding the life of a plurality of illumination light sources almost the same, and an aligner with the illumination device and a manufacturing method of a device by means of them.;SOLUTION: In an illumination method for synthesizing luminous flux of a plurality of illumination light sources and illuminating an irradiation surface, lamp output of each light source is controlled to be almost equal light source output within the range of illuminance balance allowed for the plurality of illumination light sources from illuminance difference of a plurality of light sources obtained from a light amount measured by a light amount before synthesis measurement means, a light amount measured by a light amount after synthesis measurement means and existing light source output.;COPYRIGHT: (C)2001,JPO