GAS LASER DEVICE WITH CORONA PRE-IONIZING ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide an introducing terminal structure for feeding a high voltage to a corona pre-ionizing electrode, without increasing the size of the laser chamber and without blocking a laser gas from circulating.;SOLUTION: The gas laser device having a pair of main discharge electrodes 3, 4, and the corona pre-ionizing electrode 5 disposed along the vicinity of the main discharge electrodes in the laser chamber 1, comprises an insulation member 12 mounted on a part of the wall 11 forming the laser chamber 1, one main discharge electrode 3 is mounted on the insulation member 12, and an introducing terminal 24 is provided on this member 12 for electrically connecting the pre-ionizing electrode 5 to a power feed mean 10. Fins 26 erected in the main discharging direction between the main discharge electrodes 3, 4 are formed on the inner surface of the insulation member 12 inside the laser chamber so as to surround the introducing terminal 24.;COPYRIGHT: (C)2001,JPO