Fe-Ni-Co ALLOY EXCELLENT IN ETCHING CHARACTERISTIC AND LOW THERMAL EXPANSION CHARACTERISTIC, AND SHADOW MASK EXCELLENT IN ETCHING PIT SHAPE CHARACTERISTIC

摘要

PROBLEM TO BE SOLVED: To provide an alloy having excellent etching characteristic and low thermal expansion characteristic and to provide a shadow mask excellent in etching pit shape characteristic. ;SOLUTION: This Fe-Ni-Co alloy has a composition consisting of, by mass, 2.5-7% Co, Ni in an amount satisfying (Ni+Co)=35.5 to 38%, 0.1%, preferably ≤0.05%, of Mn, and the balance essentially Fe, and C is controlled to 0.005% and further S and Cr are controlled to ≤0.0015% and ≤0.1%, respectively. The shadow mask is composed of these Fe-Ni-Co alloys.;COPYRIGHT: (C)2001,JPO