ELECTRON BEAM ORBIT CORRECTING DEVICE AND ORBIT CORRECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an electron beam orbit correcting device and correcting method, capable of correcting the orbit of electron beams in an accurate design orbit by a simple method while storaying electron beams.;SOLUTION: This electron beam orbit correcting device has a first and second steering electromagnets 60A, 60B; steering electromagnet power sources 62A, 62B for supplying exciting current to the steering electromagnets 60A, 60B; steering current control devices 64A, 64B for controlling the exciting current of the steering electromagnets 60A, 60B; a quadrupole electromagnet power source 72 for exciting quadrupole electromagnets 70A, 70B; a flow divider 74 separately changing current value flowing to the quadrupole electromagnets 70A, 70B; a bean position monitor 92 for detecting the position of electron beams; and an arithmetic unit 12 for computing the exciting current of the steering electromagnets 60A, 60B so that the electron beams have deflecting angles passing the center of the quadrupole electromagnets 70A, 70B.;COPYRIGHT: (C)2000,JPO