MAGNETIC SENSOR UTILIZING IMPEDANCE VARIATION OF A SOFT MAGNETIC ELEMENT IN DEPENDENCE UPON A MAGNETIC FIELD STRENGTH AND A METHOD OF MANUFACTURING THE SAME

摘要

A magnetic sensor (31) comprises an insulatorsubstrate (37) having first and second surfaces oppositeto each other, a soft magnetic element having first andsecond ends opposite to each other and mounted on thefirst surface of the insulator substrate, and a conductormounted on the second surface of the insulator substrate,and an output port coupled to the first and the secondends of the soft magnetic element for deriving animpedance of the soft magnetic element between the firstand the second ends. The impedance changes in dependenceupon a magnetic field strength applied to the softmagnetic element. In the magnetic sensor (31), the softmagnetic element is a soft magnetic wire (33). Theconductor is a ground conductor (35) to be grounded. Themagnetic sensor may further comprise a short-circuitingconductor (39) connecting the first end of the softmagnetic wire with the ground conductor while the outputport is coupled to the short-circuiting conductor and thesecond end of the soft magnetic wire. The soft magneticelement may comprise a soft magnetic thin film.