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process for the preparation of thick film of oxide vetrosi disilicio according to the sol gel technique and thick film so obtained.
process for the preparation of thick film of oxide vetrosi disilicio according to the sol gel technique and thick film so obtained.
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机译:溶胶-凝胶技术制备氧化硅二氧化钛厚膜的方法及其获得的厚膜。
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摘要
A sol-gel process allowing preparation, on a substrate, of glassy films of silicon oxide or mixed oxides based on silicon oxide, of thickness above 1 micrometer, generally between 2 and 20 micrometers and characterized by absence of defects, that turn out to be particularly suitable as waveguides in flat optical devices.
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