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P-doped silicon macromolecule with multi-surface structure, process for its manufacture and preparation for the process and transistor based on the silicon macromolecule

机译:具有多表面结构的p掺杂硅大分子,其制造工艺和制备方法以及基于该硅大分子的晶体管

摘要

The invention relates to a P-doped silicon macromolecule with a multilayer structure. A dopant atom is molecularly allocated to each silicon atom, the dopant atom of each molecule being located on the corners of an outer multi-surfaced structure and the silicon atom of each molecule being located on the corners of an inner multi-surfaced structure which is laterally parallel to the outer multi-surfaced structure.
机译:本发明涉及具有多层结构的P掺杂的硅大分子。掺杂剂原子在分子上分配给每个硅原子,每个分子的掺杂剂原子位于外部多表面结构的角上,每个分子的硅原子位于内部多表面结构的角上,所述内部多表面结构是横向平行于外部多表面结构。

著录项

  • 公开/公告号DE19881312D2

    专利类型

  • 公开/公告日2001-01-18

    原文格式PDF

  • 申请/专利权人 SCHMITT KLAUS;MARTIN REINHOLD;

    申请/专利号DE19981081312T

  • 发明设计人

    申请日1998-09-09

  • 分类号H01L29/26;

  • 国家 DE

  • 入库时间 2022-08-22 01:10:33

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