首页> 外国专利> Miniaturized terahertz radiation source, has element such as field emitter, electrostatic lens, beam deflector, metal grid and second anode mounted on semiconducting chip by nanolithography

Miniaturized terahertz radiation source, has element such as field emitter, electrostatic lens, beam deflector, metal grid and second anode mounted on semiconducting chip by nanolithography

机译:小型太赫兹辐射源,具有通过纳米光刻技术安装在半导体芯片上的元件,例如场发射器,静电透镜,光束偏转器,金属栅和第二阳极

摘要

The radiation source is based on the Smith-Purcell effect, whereby an energetic bundle of electrons is passed at a defined distance above a metal rod grid so that an electromagnetic wave is emitted with wavelength adjustable by varying the periodicity of the bridges the and electron speed. The elements of the radiation source, such as a field emitter (1), an electrostatic lens (4), a beam deflector (5), the metal grid (7) and a second anode (8), are mounted on a semiconducting chip with the aid of additive or conventional nanolithography.
机译:辐射源基于史密斯-珀塞尔效应(Smith-Purcell effect),从而使高能量的电子束以一定的距离通过金属棒栅上方,从而通过改变电桥和电子的周期性,以波长可调的方式发射电磁波。辐射源的元件(例如场发射器(1),静电透镜(4),光束偏转器(5),金属栅(7)和第二阳极(8))安装在半导体芯片上借助添加剂或常规纳米光刻技术。

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