Fluorescent x-ray analyzing apparatus and secondary target device disposed therein

摘要

A fluorescent X-ray analyzing apparatus includes a secondary target device therein. The secondary target device includes a target main body, and an X-ray blocking member for preventing an irradiation of primary X-rays from a X-ray source to a sample. The target main body is formed of plural target members in which secondary target materials are formed on at least target surfaces facing a central axis, and the target members are arranged concentrically to have different distances from the central axis. Accordingly, the primary X-rays do not pass through a space between the target members, and are irradiated only at the target surfaces of the target members. The secondary X-rays from the target surfaces pass through the space between the target members, and reach the sample.