Linear motor manufacturing method, linear motor, stage device equipped with the linear motor, and exposure apparatus

摘要

The Coyle frame 24 of the armature Coyle unit 23 constituting the linear motor R1 is formed from two pairs of holding portions 26 and 26 and a connecting portion 27 connecting these holding portions 26 and 26 to each other, and each flat portion is spaced at intervals corresponding to the spacing of the permanent magnets to each holding part A groove 28 for holding 25 ends 25A is formed.