Electronic line drawing picture device and electronic line drawing picture manner

摘要

PURPOSE: To readily adjust a triangular beam and draw with excellent precision by a method wherein a plurality of triangular opening parts smaller than an opening part of a first mask and a second mask having a rectangular opening part are provided, and in the second mask, the triangular opening part is provided with inclined sides in at least different four directions. ;CONSTITUTION: A variable forming rectangular opening part 1 is provided in a center of a second mask, and a triangular opening part 2 having an acute angle of 45° is arranged thereabout. The triangular opening part 2 directs toward four directions so that various inclined lines of 45° can be drawn. A memory cell drawing package figure opening part is arranged in the outer periphery of the triangular opening part 2. The triangular opening part 2 and package figure opening part are smaller than a first mask image 3, and each opening part is once emitted by the first mask image 3. When superimposing the first mask image 3 on a second mask, the superimposition is adjusted so as to select at least one of the triangular opening parts 2 of a second mask 15 arranged in a location that the directions of inclined sides become different four directions.;COPYRIGHT: (C)1996,JPO