CHEMICAL FILTER END DETECTION MONITOR, BOARD CARRYING VESSEL PROVIDED WITH IT, BOARD CARRYING VESSEL CHARGING STATION AND CHEMICAL FILTER END DETECTION METHOD

摘要

PROBLEM TO BE SOLVED: To properly detect the end of a chemical filter used for purifying a clean room or the like. SOLUTION: This chemical filter end detection monitor has a crystal resonator 2, an adsorption film 5 formed on a surface of the crystal resonator for adsorbing a constituent in a gas in a space, and means 3, 4, 6 and 7 for taking out, as the resonant frequency change of the crystal resonator, the weight change of the crystal resonator with the adsorption film caused by adsorbing the constituent in the gas by the adsorption film, and detects the end of the chemical filter by quantifying the constituent in the gas based on the resonant frequency change.