METHOD OF MANUFACTURING DYNAMIC PRESSURE-TYPE THRUST BEARING DEVICE, DYNAMIC PRESSURE-TYPE THRUST BEARING DEVICE AND HARD DISC DRIVE DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a dynamic pressure-type thrust, bearing device capable of realizing the formation of a dynamic pressure generating groove of high accuracy, and being preferably used for an air bearing used in a spindle motor of a HDD device.;SOLUTION: A recessed part is formed by photo-etching through processes of steps S1-step S3, and a projecting part is formed by a physical film formation method using ion in processes of step S4-S6, in manufacturing a semi-step pocket-type dynamic pressure thrust bearing device composed of the projecting parts arranged in the shape of a step pocket and the recessed parts formed between the adjacent projecting parts.;COPYRIGHT: (C)2002,JPO