MEASURING TECHNOLOGY FOR RHEOLOGICAL CHARACTERISTIC OF PARTICLE DISPERSION MATERIAL AND EVALUATION DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide the measuring technology for a rheological characteristic of a particle dispersion material and an evaluation device using it.;SOLUTION: This measuring method for the rheological characteristic of the particle dispersion material is used for in situ measuring the rheological characteristic of the particle dispersion material prepared by mixing a particle-like material in a liquid material in a state that original material structure is kept without breaking the material by applying the outside force such as shearing force, and comprises a process for measuring the aggregation structure of the particle-like material in the inside of the particle dispersion material as an anisotropic signal; and a process for using the anisotropic amount as an index of a rheological characteristic value of the particle dispersion material. Therefore, these measuring method and evaluation device are used for in situ measuring the particle dispersion material with the original material structure kept without breaking the material by applying the outside force such as sharing force or conducting specific work, and useful as the evaluation method and a manufacturing process control technology especially for a sealing material of a semiconductor.;COPYRIGHT: (C)2002,JPO