Stiction-based chuck for bulge tester and method of bulge testing

摘要

A bulge tester (20) for determining residual stresses, and mechanical, thermal and other properties of a thin film (26) of material. The bulge tester includes a chuck (22) that supports the substrate (24) on which the film is deposited by stiction rather than through the use of mounting waxes, adhesives and mechanical clamping. The stiction inducing media (52) may be viscous grease, a flexible sheet of material such as a rubber, an elastomer, both or other materials. Bulge testing performed using the stiction-based chuck involves inducing stiction between the base (42) of the chuck and substrate of at least at least 1 kPascal (0.69 lb/in²), as determined using a corner peel test. Then pressurized fluid is delivered to the film to be tested, and materials properties of the film are determined as a function of pressure of the fluid and deflection of the film.