首页> 外国专利> Split gate field effect transistor (FET) device employing non-linear polysilicon floating gate electrode dopant profile

Split gate field effect transistor (FET) device employing non-linear polysilicon floating gate electrode dopant profile

机译:采用非线性多晶硅浮栅电极掺杂剂分布的分栅场效应晶体管(FET)器件

摘要

Within both a split gate field effect transistor (FET) device and a method for fabricating the split gate field effect transistor (FET) device there is employed a doped polysilicon floating gate electrode having an central annular portion having a higher dopant concentration than a peripheral annular portion of the doped polysilicon floating gate electrode. The higher dopant concentration within the central annular portion of the doped polysilicon floating gate electrode provides enhanced programming speed properties of the split gate field effect transistor (FET) device. The lower dopant concentration within the peripheral annular portion of the doped polysilicon floating gate electrode provides enhanced erasing speed properties within the split gate field effect transistor (FET) device under certain circumstances of fabrication of the split gate field effect transistor (FET) device.
机译:在分离栅场效应晶体管(FET)器件和用于制造分离栅场效应晶体管(FET)器件的方法中,都采用掺杂的多晶硅浮置栅电极,其中心环形部分的掺杂物浓度高于外围环形部分。掺杂的多晶硅浮置栅电极的一部分。掺杂的多晶硅浮置栅电极的中央环形部分内较高的掺杂剂浓度提供了分离栅场效应晶体管(FET)器件的增强的编程速度特性。在分离栅场效应晶体管(FET)器件制造的某些情况下,掺杂的多晶硅浮栅电极的外围环形部分内的较低掺杂剂浓度在分离栅场效应晶体管(FET)器件内提供增强的擦除速度特性。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号