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Nanoporous silica treated with siloxane polymers for ULSI applications
Nanoporous silica treated with siloxane polymers for ULSI applications
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机译:用硅氧烷聚合物处理的纳米多孔二氧化硅,用于ULSI应用
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摘要
A surface-coated nanoporous silica dielectric film that is prepared by a process comprising the steps of forming a nanoporous silica dielectric coating on a substrate, and coating the formed nanoporous silica dielectric film with a coating composition comprising a polymer precursor, under conditions effective to form a strength-enhancing and/or hydrophobicity enhancing layer on the treated nanoporous silica dielectric film.
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