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SEGMENTING OF PROCESSING SYSTEM INTO WET AND DRY AREAS
SEGMENTING OF PROCESSING SYSTEM INTO WET AND DRY AREAS
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机译:将处理系统分段进入干湿地区
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摘要
A method and apparatus for processing a substrate is described. In one aspect, a processing system is provided which includes a wet area and a dry area. In another aspect, a method comprises processing the substrate in the process cell. The substrate is transferred from the process cell to a dry module and then transferring the substrate to a drying area.
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