The invention relates to a method for anodic bonding. The aim of the invention is to provide a method and a material suitable for said method, enabling anodic bonding to take place at room temperature. To this end, a niobium phosphate or tantalum phosphate glass having alkali ion conductivity ⊃ 10?-9Φ-1cm-1¿ at 300 K is used as bonding glass.
展开▼
