RESONATOR CHIP SENSOR FOR PRESSURE AND FORCE WITH MECHANICALLY SEPARATE PARTIAL REGIONS (SLOTS) AND A SOFT MEMBRANE

摘要

As a result of differing thermal expansions between the chip (1), containing the sensor (2), which is preferably made from silicon and the housing (13, 19), generally made from steel, thermal tensions can be induced in the sensors (2) after assembly in the housing (13, 19) during temperature variations, which can distort the measured results. According to the invention, the above tensions can at least be reduced, whereby central (9, 10) and lateral (12) fixings are made in mechanically separate partial regions of the chip (1) on the side of the sensor (2) where the force is introduced (17).