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Strain gauged sensor utilising the piezoresistive effect and its fabrication procedure

机译:利用压阻效应的应变式传感器及其制造方法

摘要

The sensor has a mono-crystalline material structure (1), such as quartz, used to support at least a stain gauge (2) formed by a semiconductor material, such as silicon, from a chosen liberally doped type. The strain gauge (2) is an element formed on a determined crystallo-graphic plane so as to favour its co-efficient of piezo-resistivity. The structure (1) is an engraved element upon a determined crystallo-graphic plane favoured for its engraving. The strain gauge (2) is fixed to the structure (1) by adhesive so that the sensor is produced. A dielectric layer supported by the structure (1) and/or the strain gauge (2) separates the strain gauge (2) from the structure (1) forming the support. Both the structure (1) and the strain gauge (2) may be formed from silicon.
机译:该传感器具有诸如石英之类的单晶材料结构(1),用于支撑至少一种由选择的自由掺杂类型的半导体材料(例如硅)形成的污点规(2)。应变仪(2)是在确定的结晶图面上形成的元件,以有利于其压电电阻系数。结构(1)是在确定的晶体图形平面上的雕刻元素,该雕刻图形有利于雕刻。应变仪(2)通过粘合剂固定在结构(1)上,从而制成传感器。由结构(1)和/或应变仪(2)支撑的介电层将应变仪(2)与形成支撑件的结构(1)分开。结构(1)和应变仪(2)都可以由硅形成。

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