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Semiconductor device production method thereof and coil spring cutting jig and coil spring guiding jig applied thereto
Semiconductor device production method thereof and coil spring cutting jig and coil spring guiding jig applied thereto
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机译:半导体器件的制造方法及其所应用的螺旋弹簧切割夹具和螺旋弹簧引导夹具
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摘要
PURPOSE: To provide a semiconductor device having a flip-chip structure of high connection reliability in which occurrence of incomplete connection due to difference of thermal expansion between a functional element device and a circuit device can be prevented, a connection body of a circuit board and a functional element device rejected in electrical inspection after temporary connection can be reconnected easily after separated temporarily, and low thermal resistance can be ensured even when a large power consuming function element device having simple structure and a low package cost is used, to provide its manufacturing method, and a coil spring cutting jig and a coil spring feed jig for use therein. CONSTITUTION: A metal layer 3 is provided on the surface layer of the surface circuit board electrode 5 of a circuit board 6, a metal layer 3 is provided on the surface layer of the chip electrode 2 of a function element chip 1, a vertical coil spring 4 is connected with the surface circuit board electrode 5 and the chip electrode 2 through respective metal layers 3, and the surface circuit board electrode 5 is flip-chip connected with the chip electrode 2 through the vertical coil spring 4.
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