Manufacturing method of soft magnetic multilayer thin films for high-frequency

摘要

A method for producing a high frequency soft magnetic multilayer thin film is disclosed. In the multilayer thin film manufacturing method of alternately stacking a thin film having a microcrystalline structure, such as Fe and CoNbZr on the substrate, characterized in that the soft magnetic properties by using a mixed gas of hydrogen and argon as the atmosphere gas when manufacturing the multilayer thin film Provides a method of manufacturing a soft magnetic multilayer thin film for high frequency to have a high saturation magnetic flux density, magnetic head, sensor, transformer or As the inductor material, it is possible to provide a method capable of more preferably controlling the microstructure of the Fe-based multilayer thin film.