Coplanar waveguide with a low impedance on silicon substrate with the use of a material with a high dielectric constant

摘要

A coplanar waveguide on a carrier (2) arranged parallel, of each other an electrically insulating intermediate space (8), which conductor strip (5, 6, 7), is characterized in that on the conductor strips on its side facing away from the carrier, a material with a high dielectric constant is arranged. This makes it possible for a line section with a relatively small characteristic impedance can be realized.