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Surface wave component, volume waves transducer and longitudinally volume waves transducer

机译:面波分量,体波换能器和纵向体波换能器

摘要

A surface wave component comprises a substrate and an electrode, which is arranged on the substrate. The electrode has a specific resistance value rho of up to about 1 omega been cm and is made from a zno - film with a low resistance value is produced, which has an externally substance doping. A piezoelectric film with a specific resistance value rho of at least about 10 · 6 · omega been cm and a lattice constant of, within approximately + - 20% of that of the zno is arranged on the electrode. An interdigital electrode is arranged on the piezoelectric film.
机译:表面波分量包括基板和布置在基板上的电极。电极的比电阻值rho最高可达约1Ω·cm,由具有低电阻值的zno膜制成,该膜具有外部物质掺杂。在电极上设置压电膜,该压电膜的比电阻值rho为至少约10·6·Ω·cm,且晶格常数在zno的约±20%以内。叉指电极布置在压电膜上。

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