Workpiece measuring apparatus uses an image-processing device, especially for use in determining the position of contact pins, etc. on integrated circuits where the effects of scattered light have to be combated

摘要

Device for measuring workpieces (1) has an image processing arrangement with optically transparent supports (3, 4) for positioning the workpiece with respect to an image-recording device. A scatter element (7) produces largely homogeneous diffuse illumination. The amount (V) by which the image-recording device extends beyond the side surfaces of the scatter device is so small that required measurement accuracy can be obtained without using shutter elements.