Interferometric optical system with high operating rate has reference and measuring arms directing luminous beams and receiver with Young apertures

摘要

The optical system consists of a reference arm (17) directing a luminous reference beam, a measuring arm (16) directing a luminous measuring beam and equipped with a measured object (5) on which the beam is reflected, and a receiver (18) with Young apertures for the interference signal between the luminous beams, and an electronic unit for interpreting the interference signal. An optical coupling providing the reference and measuring beams is fed with polychromatic light from a source (S), and the measurement range is modified by a transparent sheet after the Young apertures. During operation reference and measuring luminous beams produced from the poly chromatic light source are reflected from a mirror (6) and the measured object (5) before being introduced into the receiver with Young apertures and picked up by a CCD charge transfer sensor to collect the interference signal.