PENETRATION STRUCTURE OF CONNECTION LINE IN AIR-TIGHT CHAMBER, DISCHARGE APPARATUS COMPRISING THE SAME, PRODUCTION METHODS FOR LIQUID CRYSTAL DISPLAY APPARATUS, ORGANIC EL DEVICE, ELECTRON DISCHARGE APPARATUS, PDP APPARATUS, ELECTROPHORESIS DISPLAY APPARATUS, COLOR FILTER, AND ORGANIC EL, AND FORMATION METHOD FOR SPACER, METAL WIRING, LENS, RESIST, AND LIGHT DIFFUSION BODY

摘要

PROBLEM TO BE SOLVED: To provide a penetration structure of a connection line in an air-tight chamber with which sealing between the wall body of the air-tight chamber and the connection line penetrating the wall body is reliably formed, and to provide a discharge apparatus provided with the penetration structure.;SOLUTION: The penetration structure of the connection line 6, which penetrates the wall body 33 of the air-tight chamber 31 with the connection line connecting a work treatment apparatus 2 housed in the air-tight chamber 31 to an appended apparatus 4 of the work treatment apparatus 2, is provided with a penetration sleeve 61 into which the connection line 6 is inserted and which penetrates the wall body 33, a first seal member 63 packed in the inside of the penetration sleeve 61 for sealing the space between penetration sleeve 61 and the connection line 6, and a second seal member 64 for sealing the space between the penetration sleeve 61 and the wall body 33.;COPYRIGHT: (C)2003,JPO