CALIBRATION METHOD FOR SENSITIVITY OF X-RAY FOREIGN MATTER INSPECTION APPARATUS AND FOREIGN MATTER SAMPLE BODY FOR SENSITIVITY CALIBRATION

摘要

PPROBLEM TO BE SOLVED: To provide a calibration method which enables a sensitivity calibration operation of an X-ray foreign matter inspection apparatus efficiently and to provide a foreign matter sample body for sensitivity calibration. PSOLUTION: The calibration method for the sensitivity of the X-ray foreign matter inspection apparatus which detects foreign matter contained in a specimen by transmitted X-rays enables the use of the foreign matter sample body which is provided integrally with a foreign matter sample having a first volume and a foreign matter sample having a second volume as one set to irradiate the specimen to which the foreign matter sample body is added with X-rays. The sensitivity of the X-ray foreign matter inspection apparatus is calibrated by a foreign matter detection signal, with reference to the foreign matter samples having the different volumes, which is output based on image data on its transmitted X-ray image. PCOPYRIGHT: (C)2003,JPO