PROBLEM TO BE SOLVED: To protect a torquer electrode against welding or damage and to prevent a mass body from sticking to a fixed electrode plate. ;SOLUTION: Stoppers 31 are projected from the opposite plate faces of a planar mass body 11 such that they are positioned on an axis perpendicular to a plate face passing through the center of gravity G of the mass body 11 supported displaceably by a hinge 12. Capacitance detecting electrodes 21 are provided on the top surface of the stoppers 31 and plate surface torquer electrodes 22 are provided except the stopper 31 forming part of the mass body 11. Even if an undue displacement is generated in the mass body 11, the stopper 31 touches a fixed electrode plate 14 to avoid contact of the torquer electrodes 22, 23. Furthermore, sticking can be prevented because the stopper 31 can decrease the contact area when the mass body 11 touches the fixed electrode plate 14.;COPYRIGHT: (C)2001,JPO
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