METHOD AND DEVICE FOR ELECTRODEPOSITION OF THREE- DIMENSIONAL MICRO-ELECTRODEPOSITED STRUCTURE, ELECTRODE FOR MANUFACTURING THREE-DIMENSIONAL MICRO- ELECTRODEPOSITED STRUCTURE, AND METHOD AND DEVICE FOR ELECTRODEPOSITION USING THE ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for electrodeposition of a three- dimensional micro-electrodeposited structure for improving the dimensional accuracy of the deposit, an electrode for manufacturing the three-dimensional micro-electrodeposited structure, and a method and a device for electrodeposition using the electrode.;SOLUTION: The three-dimensional micro-electrodeposited structure is manufactured by controlling a current wire by using a shielding plate having a small hole and independently movable from an electrode. The electrode for manufacturing the three-dimensional micro-electrodeposited structural body comprises an electrode material which is larger in size than the deposit and a current wire bundle body to converge the current lines generated by the electrode material, and electrodeposition is performed by using the electrode.;COPYRIGHT: (C)2004,JPO