METHOD OF MANUFACTURING ELECTROSTATIC ACTUATOR, ELECTROSTATIC ACTUATOR, INKJET RECORDING HEAD, AND INKJET RECORDER

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrostatic actuator wherein an extremely high bonding temperature which is of a problem in the case where direct bonding capable of highly accurate controlling of a gap is performed, can be lowered and a necessary strength can be achieved.;SOLUTION: An electrode substrate 10 having formed thereon an electrode 14 and a diaphragm substrate 20 having formed thereon a diaphragm 22 are formed. After each of the substrates is washed, a bonding face is made to be hydrophilic so that the face is made to be in a condition which tends to be directly bonded. These substrates are quietly aligned and placed in a vacuum chamber, and then the pressure is lowered to be not greater than a degree of vacuum of the atmosphere pressure, thereby completing the preliminary bonding. Next, energy by a microwave is applied thereto to activate an absorption water or a hydroxyl group so that the electrostatic actuator having the strong bonding property can be manufactured.;COPYRIGHT: (C)2003,JPO