APPARATUS FOR GAS PHASE SYNTHESIZING 5 KINDS OR MORE DIAMONDS USING SINGLE REACTOR VESSEL

摘要

PROBLEM TO BE SOLVED: To solve the problem that the diamonds synthesized by conventional independent apparatus are having difficulties in synthetic conditions for each apparatus.;SOLUTION: A novel CVD apparatus never existed before is able to synthesize at least ≥5 kinds of conventional diamond CVD methods with only one gas phase synthesizing equipment by making comprehensively combinations of ≥5 kinds of conventional diamond CVD methods as many as possible. This novel CVD method allows to synthesize a novel state diamond, and provides a novel area of usage never known before. On the other hand, this invention provides 'modulation CVD equipment' of a novel CVD mode, and also provides a diamond synthesizing apparatus which modulates crystal growing condition of gas phase synthesizing diamond to obtain periodically modulated, structure of crystal property (structural sensitivity).;COPYRIGHT: (C)2003,JPO