ABSORPTION LAYER FORMING METHOD FOR OPTICAL ELEMENT ANALYSIS, OPTICAL ELEMENT ANALYZING METHOD, PROGRAM FOR FORMING ABSORPTION LAYER FOR OPTICAL ELEMENT ANALYSIS, AND OPTICAL ELEMENT ANALYZING PROGRAM

摘要

PROBLEM TO BE SOLVED: To make analyzable the behavior of an electromagnetic wave made incident on an optical element having no periodic structure with high accuracy and a small calculation quantity by using RCWA (rigorous coupled-wave analysis) for analyzing the behavior of an electromagnetic wave made incident on an optical element having an infinite periodic structure by using an absorption layer.;SOLUTION: A function n(1)=1+(p(1)(l/l_tot))^p(3)+i(p(2)(l/l_tot))^p(4) is assumed as a function prescribing the refractive index distribution that the absorption layer consisting of a plurality of layers has and a slide simplex method, etc., is used to search a value of a refractive index parameter enabling the absorption layer to actualize a larger electromagnetic absorbing function under a specified restriction condition of the thickness of the absorption layer, thereby forming the absorption layer having the largest electromagnetic absorbing function. A model which is sectioned by the absorption layer is generated as a mathematical model for an optical element to be analyzed and RCWA is applied thereto.;COPYRIGHT: (C)2003,JPO