ALUMINUM NITRIDE POWDER HAVING EQUAL TO OR ABOVE MICROMETER-ORDERED AVERAGE PARTICLE DIAMETER AND HIGH SPHERICITY, METHOD AND APPARATUS OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide novel high sphericity aluminum nitride powder in which it is attained simultaneously that the melting, solidification or aggregation of a product is prevented, high dispersibility is exhibited, a primary particle diameter is within a range from 0.05 μm to 100 μm, an average particle diameter is ≥1 μm and the external shape of the particles is rounded, and a method and an apparatus for manufacturing the same. ;SOLUTION: The powder containing Al element and N element is manufactured using a manufacturing method and a manufacturing apparatus for advancing an oxynitride reaction in a vapor phase or in the presence of flame by controlling the following technical requirements at the same time, that is (1) the high dispersion and the stable fluidization or the formation of aerosol state of raw material powder having a primary particle diameter within a range from 0.001 μm to 500 μm, (2) the utilization of a direct nitriding method or a reduction nitriding method using the high temperature by the flame as driving force and (3) the ratio control of the raw materials and the flame quantity, the optimization of the quantity of produced carbon using as a reducing agent or the continuity of a heat treatment process.;COPYRIGHT: (C)2003,JPO