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Method of making phase mask for machining optical fiber and optical fiber having bragg diffraction grating produced using the phase mask for machining optical fiber

机译:制造用于加工光纤的相位掩模的方法以及具有使用该用于加工光纤的相位掩模制造的布拉格衍射光栅的光纤

摘要

The present invention relates to a method of producing an optical fiber-processing phase mask having minimized connection errors that may degrade the spectral line shape and group delay characteristics of an optical fiber diffraction grating fabricated by using the phase mask. The present invention provides a method of producing an optical fiber-processing phase mask having a repeating pattern of grating-shaped grooves and strips provided on one surface of a transparent substrate, so that diffracted light produced by the repeating pattern is applied to an optical fiber to fabricate a diffraction grating in the optical fiber by interference fringes of diffracted light of different orders. In making a mask having a plurality of juxtaposed patterns (P1 to P5) having a linearly or nonlinearly increasing or decreasing pitch and a uniform groove-strip width ratio, multiple exposure is carried out to minimize difference between the pitch at the joint between patterns having different pitch data and the pitch in each individual pattern.
机译:本发明涉及一种具有最小化连接误差的光纤处理相位掩模的制造方法,该相位误差会降低通过使用该相位掩模制造的光纤衍射光栅的光谱线形状和群延迟特性。本发明提供一种制造在透明基板的一个面上具有格子状的沟槽和带的重复图案的光纤加工用相位掩模的方法,将由该重复图案产生的衍射光照射到光纤上。通过不同阶次衍射光的干涉条纹在光纤中制造衍射光栅。在制作具有线性或非线性增大或减小的间距和均匀的沟槽-条带宽度比的多个并置图案(P 1 到P 5 )的掩模时,进行曝光以使具有不同间距数据的图案之间的接合处的间距与每个单独图案中的间距之间的差异最小。

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