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Method of manufacturing linear motor, linear motor, stage apparatus equipped with linear motor and exposure apparatus
Method of manufacturing linear motor, linear motor, stage apparatus equipped with linear motor and exposure apparatus
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机译:直线电动机的制造方法,直线电动机,具备该直线电动机的载物台装置及曝光装置
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摘要
A coil frame of an armature coil unit constituting a linear motor comprises a pair of holding portions and a connection portion that connects these holding portions to each other, and grooves that holds ends of the respective flat coils are formed at an interval corresponding to an array interval of permanent magnets.
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