PROCESS MODULES FOR TRANSPORT POLYMERIZATION OF LOW Epsilon THIN FILMS

摘要

A Process Module ("PM") is designed to facilitate Transport Polymerization ("TP") of precursors that are useful for preparations of low Dielectric Constant ("") films. The PM consists primarily of a Material Delivery System ("MDS") with a high temperature Vapor Phase Controller ("VFC"), a TP Reactor, a Treatment Chamber, a Deposition Chamber and a Pumping System. The PM is designed to facilitate TP for new precursors and for film deposition and stabilization processes.