Vacuum pump system for conveying gases and producing a high vacuum comprises pump units connected in series to form a compact pump system and having rotating parts attached to separate shafts operated by their own drive systems

摘要

Vacuum pump system comprises several pump units (2, 3) connected in series and consisting of fixed and rotating pump parts. The pump units form a compact pump system and the rotating parts of the individual pump units are attached to separate shafts operated by their own drive systems (4, 5). An Independent claim is also included for a process for operating the above vacuum pump system. Preferred Features: The individual drive systems are supplied with electricity via a common supply device (6).