Device for drying substrate comprises opening and moving device to simultaneously sweep leading and trailing faces of substrate held in tank to create Marangoni instability films

摘要

A device (1) for drying a substrate incorporates an opening and a moving device (4) that simultaneously sweeps, in the horizontal plane or in the vertical plane, the leading and trailing faces of the substrate (2) retained by grips (3) in a tank (5). An Independent claim is also included for drying a substrate using the above device with ultra-pure water and a magnetic or electric field to create Marangoni instability films.