FACILITY FOR COATING METALLIC FOIL AND METHOD FOR MANUFACTURING COATED METALLIC FOIL

摘要

PROBLEM TO BE SOLVED: To provide a facility for coating a metallic foil which effectively performs coating of various films and heat treatment onto the surface of a rolled metallic foil in a single step, and to provide a method for manufacturing a coated metallic foil with the use of the facility.;SOLUTION: The facility for coating the metallic foil has a mechanism for melting and evaporating a vaporizing source, and a mechanism for feeding and winding the metallic foil in a vacuum vessel, wherein each rotating shaft of the feeding mechanism, the winding mechanism, a metallic-foil-forwarding mechanism and a driving mechanism is all arranged parallel, and a solid lubricant is used in the bearings. The method for manufacturing the coated metallic foil is characterized by continuously coating a film onto the surface of the metallic foil at a surface temperature of the metallic foil of 100-1,000°C and in an ambient pressure of 0.2Pa or less, while using the above facility.;COPYRIGHT: (C)2004,JPO