Creation of electron microscope sample for observation method and electron microscopy for sample processing equipment

摘要

PROBLEM TO BE SOLVED: To prevent separation at an interface of layers of a layered film and at an interface between the layered film and a substrate material. ;SOLUTION: A substrate 1 having a layered film 4 formed thereon is fixed to a sample stage. The layered film 4 and an upper part of the substrate 1 are removed to form grooves 3 in the periphery of an area to be observed by a laser light of a laser processing apparatus. An island-shaped layered film part 5 is thus formed. The substrate 1 is cut along the grooves 3 by a high-speed rotary peripheral cutting edge 10 of a high-speed rotary peripheral cutting edge processing apparatus.;COPYRIGHT: (C)1999,JPO