OPTICAL ELEMENT SUPPORTING MEANS, OPTICAL SYSTEM USING THE OPTICAL ELEMENT SUPPORTING MEANS, METHOD FOR REGULATING OPTICAL SYSTEM, EXPOSING DEVICE, EXPOSING METHOD AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical element supporting means by which form distortion of an optical element caused by thermal expansion difference between the optical element and a supporting member for supporting the optical element and by assembly of the supporting member can be prevented at the time of supporting the optical element and to provide an optical system by the optical element supporting means, an optical system regulating method, an exposing device, an exposing method and a device manufacturing method.;SOLUTION: The optical element supporting means for supporting the optical element is constituted by providing with a first holding member 2 having two or more supporting parts for supporting a peripheral part of the optical element and with a second holding member 5 which is connected between the two supporting parts via the first holding member and an elastic member and which supports the optical element.;COPYRIGHT: (C)2004,JPO