TEMPERATURE CONTROL DEVICE, TEMPERATURE CONTROL METHOD AND HEATING FURNACE

摘要

PROBLEM TO BE SOLVED: To perform product heating treatment with reliability by performing temperature control of a heater with high accuracy even on the occurrence of aging degradation of a heater surface.;SOLUTION: A contactless temperature detecting sensor 3 is installed on an electric tilt stage 5 to control the temperature of a heater used as a heat source of the heating furnace. The temperature is successively measured at a plurality of points on the surface of the heater 2 by driving the stage 5. A control means for controlling the heater analyzes temperature detection data from a plurality of points, adopts the highest temperature detection data out of the detected temperature of a plurality of points, and controls current application to the heater on the basis of the adopted data. Since the detected temperature becomes lower than the actual value when separation occurs due to the surface degradation of the heater, the highest temperature detection data of a plurality of points is adopted to allow the heater temperature of a normal part to be reflected in the heater control.;COPYRIGHT: (C)2004,JPO