Development foul solution reproducing arrangement and development foul solution regenerative manner

摘要

PROBLEM TO BE SOLVED: To regenerate tetraalkylammonium hydroxide-containing liquid form a waste liquid developer in a semiconductor manufacturing plant, or the like. ;SOLUTION: The device for regenerating the waste liquid developer is provided with a first separating means 5 and a second separating means 11. The first separating means 5 has a waste liquid developer transportation sections 13, 14 for transporting the waste liquid developer containing a tetraalkylammonium hydroxide and a photo-resist, a first storage tank 2 for storing transported waste liquid developer and a first nanofiltration membrane and separates the waste liquid developer stored in the first storage tank to first permeated liquid containing the tetraalkylammonium hydroxide and a first impermeated component. The second separating means 11 has a second storage tank for storing the first permeated liquid and a second nanofiltration membrane having partition molecular weight different from that of the first nonofiltration membrance and separates the first permeated liquid stored in the second storage tank to second permeated liquid and a second impermeated component containing the tetraalkylammonium hydroxide.;COPYRIGHT: (C)2003,JPO