A lead zirconate titanate-based thin film is an epitaxial crystal thin film and has a chemical composition represented by the general formula Pb1-xLnxZryTi1-yO3 (wherein Ln represents any one selected from the group consisting of lanthanum, lanthanoid elements, niobium, calcium, barium, strontium, iron, manganese and tin; and 0≦x1, 0.43≦y≦0.65) and whose orientation is {111} (including orientations whose tilt angle from the direction perpendicular to the substrate surface is within 15°).
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机译:锆钛酸铅钛基薄膜是外延晶体薄膜,其化学组成由通式Pb 1-x Sub> Ln x Sub> Zr y < / Sub> Ti 1-y Sub> O 3 Sub>(其中Ln代表选自镧,镧系元素,铌,钙,钡,锶,铁,锰和锡;以及0lE; x <1,0.43&lE; y&lE; 0.65),其取向为&lcub; 111&rcub; (包括相对于垂直于基板表面的方向的倾斜角在15°以内的取向)。
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