首页>
外国专利>
Gas-expanded liquids, methods of use thereof, and systems using gas-expanded liquids for cleaning integrated circuits
Gas-expanded liquids, methods of use thereof, and systems using gas-expanded liquids for cleaning integrated circuits
展开▼
机译:气体膨胀液体,其使用方法以及使用气体膨胀液体清洁集成电路的系统
展开▼
页面导航
摘要
著录项
相似文献
摘要
Gas-expanded liquids, methods of use thereof, and systems of using gas-expanded liquids are provided. One exemplary system, among others, includes: a gas-expanded liquid system comprising a gas and a liquid, wherein the gas-expanded liquid system is adapted to generate a gas-expanded liquid; and a substrate handling system adapted to position a substrate having a photoresist layer so that the gas-expanded liquid can be made to contact the substrate to remove the photoresist layer.
展开▼